JPH038491B2 - - Google Patents

Info

Publication number
JPH038491B2
JPH038491B2 JP56092291A JP9229181A JPH038491B2 JP H038491 B2 JPH038491 B2 JP H038491B2 JP 56092291 A JP56092291 A JP 56092291A JP 9229181 A JP9229181 A JP 9229181A JP H038491 B2 JPH038491 B2 JP H038491B2
Authority
JP
Japan
Prior art keywords
grating
phase difference
light
optical system
lights
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP56092291A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57207805A (en
Inventor
Yoshitada Oshida
Hiroshi Makihira
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP56092291A priority Critical patent/JPS57207805A/ja
Publication of JPS57207805A publication Critical patent/JPS57207805A/ja
Publication of JPH038491B2 publication Critical patent/JPH038491B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
JP56092291A 1981-06-17 1981-06-17 Displacement measuring device Granted JPS57207805A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56092291A JPS57207805A (en) 1981-06-17 1981-06-17 Displacement measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56092291A JPS57207805A (en) 1981-06-17 1981-06-17 Displacement measuring device

Publications (2)

Publication Number Publication Date
JPS57207805A JPS57207805A (en) 1982-12-20
JPH038491B2 true JPH038491B2 (en]) 1991-02-06

Family

ID=14050303

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56092291A Granted JPS57207805A (en) 1981-06-17 1981-06-17 Displacement measuring device

Country Status (1)

Country Link
JP (1) JPS57207805A (en])

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4636077A (en) * 1983-04-15 1987-01-13 Matsushita Electric Industrial Co., Ltd. Aligning exposure method
USRE34010E (en) * 1985-03-22 1992-07-28 Nikon Corporation Position detection apparatus
JPS6212814A (ja) * 1985-07-10 1987-01-21 Canon Inc ロ−タリ−エンコ−ダ−
DE3700777C2 (de) * 1986-01-14 1994-05-05 Canon Kk Vorrichtung zur Erfassung der Position eines Objektes
DE3700906C2 (de) * 1986-01-14 1995-09-28 Canon Kk Verschlüßler
FR2598797B1 (fr) * 1986-05-07 1990-05-11 Nippon Telegraph & Telephone Procede de mesure et/ou d'ajustement du deplacement d'un objet et appareil pour la mise en oeuvre de ce procede
JPH0648170B2 (ja) * 1987-05-11 1994-06-22 キヤノン株式会社 変位測定装置
JPH0648169B2 (ja) * 1987-05-11 1994-06-22 キヤノン株式会社 測長装置
JPS63309816A (ja) * 1987-06-12 1988-12-16 Tokyo Seimitsu Co Ltd リニアスケ−ル
JPH0690052B2 (ja) * 1987-06-12 1994-11-14 株式会社東京精密 光学干渉装置
JPS63309817A (ja) * 1987-06-12 1988-12-16 Tokyo Seimitsu Co Ltd リニアエンコ−ダ
JPH02147816A (ja) * 1988-11-29 1990-06-06 Tokyo Seimitsu Co Ltd スケール読取装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2240968A1 (de) * 1972-08-21 1974-03-07 Leitz Ernst Gmbh Optisches verfahren zur messung der relativen verschiebung eines beugungsgitters sowie einrichtungen zu seiner durchfuehrung
JPS5174659A (en]) * 1974-12-24 1976-06-28 Nippon Electric Co
JPS5938521B2 (ja) * 1979-10-26 1984-09-18 日本電信電話株式会社 微小変位測定および位置合わせ装置

Also Published As

Publication number Publication date
JPS57207805A (en) 1982-12-20

Similar Documents

Publication Publication Date Title
US4200395A (en) Alignment of diffraction gratings
US8604413B2 (en) Optical encoder including displacement sensing normal to the encoder scale grating surface
CN107462159B (zh) 位移检测装置
US5751426A (en) Positional deviation measuring device and method for measuring the positional deviation between a plurality of diffraction gratings formed on the same object
JP3364382B2 (ja) 試料面位置測定装置及び測定方法
JP2679221B2 (ja) 干渉計
JPH038491B2 (en])
JP2004144581A (ja) 変位検出装置
JPH03255904A (ja) 微小変位検出装置
JPH06137830A (ja) 干渉計測方法及び干渉計測装置
US7349102B2 (en) Methods and apparatus for reducing error in interferometric imaging measurements
EP0408381A2 (en) Position signal producing apparatus
JP2732849B2 (ja) 干渉測長器
JPH043806B2 (en])
US6765681B1 (en) Measuring optical phase
JPH116719A (ja) 干渉測定装置
JP3030905B2 (ja) 定点検出装置
JPH04212002A (ja) 測定方法及び装置
JP4404184B2 (ja) 変位検出装置
JP2000002510A (ja) 変位情報測定装置
JP2691298B2 (ja) 位置合わせ装置およびそれを備えた露光装置
JP2718439B2 (ja) 測長または測角装置
JP2544447B2 (ja) 深さ測定方法および装置
JP2694045B2 (ja) 回折格子を用いた位置合せ装置
JP2723502B2 (ja) 位置決め方法